Zheltukhin V.S., Shemakhin A.Yu., Samsonova E.S., Terentev T.N. Modeling the dependence of the electron density on the gas flow rate in the induction plasma of argon

Shemakhin A.Yu. (KFU, Kazan, Russia), Zheltukhin V.S., Mathematical modeling of RF plasma flow at low pressures taking into account the charge on the sample

Mathematical modeling of plasma flow at low pressures in vacuum chamber with charge on body

A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem

Nekrasov I.K., Mamed-Yusifov A.A., Akchurin A.D., Shemakhin A.Yu., Zheltukhin V.S., Experimental study of inductively coupled rf plasma in a wide frequency range

Self-consistent model of under pressure HF induction discharge

Mathematical modeling of RF plasma flow at low pressures in non-local estimation

SIMULATION OF LOW PRESSURE ICRF PLASMA FLOW IN NON-LOCAL APPROXIMATION