Nekrasov I.K., Mamed-Yusifov A.A., Akchurin A.D., Shemakhin A.Yu., Zheltukhin V.S., Experimental study of inductively coupled rf plasma in a wide frequency range

Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

An installation for numerical and experimental studies of low-pressure RF plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed