KFU. Card publication. Formation of Nanoporous Si and Ge Layers by Low-Energy Ag-Ion Implantation

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FEDERAL UNIVERSITY

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FORMATION OF NANOPOROUS SI AND GE LAYERS BY LOW-ENERGY AG-ION IMPLANTATION

Form of presentation

Articles in international journals and collections

Year of publication

2014

Authors, employees of KFU

Vorobev Vyacheslav Valerevich, author

Osin Yuriy Nikolaevich, author

Stepanov Andrey Lvovich, author

Other authors

Ermakov; Valeev; Nuzhdin

Authors, postgraduates KFU

Vorobev Vyacheslav Valerevich, postgraduate kfu

Bibliographic description in the original language

A. L. Stepanov, V. V. Vorobev, Y. N. Osin, M.A. Ermakov, V. F. Valeev, V. I. Nuzhdin6Formation of Nanoporous Si and Ge Layers by Low-Energy Ag+-Ion Implantation// Scientific Journal of Microelectronics, July 2014, Vol. 4 Iss. 3, PP. 11-17

Annotation

Scientific Journal of Microelectronics

Keywords

Nanoporous Silicon and Germanium; Silver Nanoparticles; Ion Implantation

The name of the journal

Scientific Journal of Microelectronics

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=92387&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Vorobev Vyacheslav Valerevich	ru_RU
dc.contributor.author	Osin Yuriy Nikolaevich	ru_RU
dc.contributor.author	Stepanov Andrey Lvovich	ru_RU
dc.contributor.author	Vorobev Vyacheslav Valerevich	ru_RU
dc.date.accessioned	2014-01-01T00:00:00Z	ru_RU
dc.date.available	2014-01-01T00:00:00Z	ru_RU
dc.date.issued	2014	ru_RU
dc.identifier.citation	A. L. Stepanov, V. V. Vorobev, Y. N. Osin, M.A. Ermakov, V. F. Valeev, V. I. Nuzhdin6Formation of Nanoporous Si and Ge Layers by Low-Energy Ag+-Ion Implantation// Scientific Journal of Microelectronics, July 2014, Vol. 4 Iss. 3, PP. 11-17	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=92387&p_lang=2	ru_RU
dc.description.abstract	Scientific Journal of Microelectronics	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Formation of Nanoporous Si and Ge Layers by Low-Energy Ag-Ion Implantation	ru_RU
dc.type	Articles in international journals and collections	ru_RU