Form of presentation | Articles in international journals and collections |
Year of publication | 2014 |
|
Shemakhin Aleksandr Yurevich, author
|
Other authors |
V. S. Zheltukhin |
Bibliographic description in the original language |
V. S. Zheltukhin, A. Yu. Shemakhin. Simulation of RF plasma flowing at low pressure // Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, pp 101-107
|
Annotation |
A mathematical model that describes RF plasma flowing at a pressure of 13.3?133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given. |
Keywords |
simulation, radio-frequency plasma, low pressure, jet flow, transient mode, Monte-Carlo method, statistical simulation |
The name of the journal |
Mathematical Models and Computer Simulations
|
URL |
http://link.springer.com/article/10.1134%2FS2070048214010141#page-1 |
Please use this ID to quote from or refer to the card |
https://repository.kpfu.ru/eng/?p_id=86957&p_lang=2 |
Full metadata record ![](https://shelly.kpfu.ru/pdf/picture/arrow_black_right.gif) |
Field DC |
Value |
Language |
dc.contributor.author |
Shemakhin Aleksandr Yurevich |
ru_RU |
dc.date.accessioned |
2014-01-01T00:00:00Z |
ru_RU |
dc.date.available |
2014-01-01T00:00:00Z |
ru_RU |
dc.date.issued |
2014 |
ru_RU |
dc.identifier.citation |
V. S. Zheltukhin, A. Yu. Shemakhin. Simulation of RF plasma flowing at low pressure // Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, pp 101-107
|
ru_RU |
dc.identifier.uri |
https://repository.kpfu.ru/eng/?p_id=86957&p_lang=2 |
ru_RU |
dc.description.abstract |
Mathematical Models and Computer Simulations |
ru_RU |
dc.description.abstract |
A mathematical model that describes RF plasma flowing at a pressure of 13.3?133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given. |
ru_RU |
dc.language.iso |
ru |
ru_RU |
dc.subject |
simulation |
ru_RU |
dc.subject |
radio-frequency plasma |
ru_RU |
dc.subject |
low pressure |
ru_RU |
dc.subject |
jet flow |
ru_RU |
dc.subject |
transient mode |
ru_RU |
dc.subject |
Monte-Carlo method |
ru_RU |
dc.subject |
statistical simulation |
ru_RU |
dc.title |
Simulation of RF plasma flowing at low pressure |
ru_RU |
dc.type |
Articles in international journals and collections |
ru_RU |
|