KFU. Card publication. Simulation of RF plasma flowing at low pressure

KAZAN
FEDERAL UNIVERSITY

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- 中文
- ES

SIMULATION OF RF PLASMA FLOWING AT LOW PRESSURE

Form of presentation

Articles in international journals and collections

Year of publication

2014

Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Other authors

V. S. Zheltukhin

Bibliographic description in the original language

V. S. Zheltukhin, A. Yu. Shemakhin. Simulation of RF plasma flowing at low pressure // Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, pp 101-107

Annotation

A mathematical model that describes RF plasma flowing at a pressure of 13.3?133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given.

Keywords

simulation, radio-frequency plasma, low pressure, jet flow, transient mode, Monte-Carlo method, statistical simulation

The name of the journal

Mathematical Models and Computer Simulations

URL

http://link.springer.com/article/10.1134%2FS2070048214010141#page-1

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=86957&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2014-01-01T00:00:00Z	ru_RU
dc.date.available	2014-01-01T00:00:00Z	ru_RU
dc.date.issued	2014	ru_RU
dc.identifier.citation	V. S. Zheltukhin, A. Yu. Shemakhin. Simulation of RF plasma flowing at low pressure // Mathematical Models and Computer Simulations, 2014, Volume 6, Issue 1, pp 101-107	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=86957&p_lang=2	ru_RU
dc.description.abstract	Mathematical Models and Computer Simulations	ru_RU
dc.description.abstract	A mathematical model that describes RF plasma flowing at a pressure of 13.3?133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given.	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	simulation	ru_RU
dc.subject	radio-frequency plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	jet flow	ru_RU
dc.subject	transient mode	ru_RU
dc.subject	Monte-Carlo method	ru_RU
dc.subject	statistical simulation	ru_RU
dc.title	Simulation of RF plasma flowing at low pressure	ru_RU
dc.type	Articles in international journals and collections	ru_RU