KFU. Card publication. 202. N.I. Nurgazizov, A.A. Bukharaev, Roza M.Aminova and D.V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of International Conference “Micro- and Nanoelectronics - 2003” (ICMNE-2003), Zvenigorod, Moskow district, October 6-10, 2003. Ñ. 203. Niaz I. Nurgazizov, Anastas A. Bukharaev, Roza M.Aminova and Denis V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of SPIE, Micro- and Nanoelectronics

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202. N.I. NURGAZIZOV, A.A. BUKHARAEV, ROZA M.AMINOVA AND D.V.OVCHINNIKOV. INVESTIGATION OF DISSOLUTION PROCESS OF IMPLANTED SILICON DIOXIDE. PROCEEDINGS OF INTERNATIONAL CONFERENCE &LDQUO;MICRO- AND NANOELECTRONICS - 2003&RDQUO; (ICMNE-2003), ZVENIGOROD, MOSKOW DISTRICT, OCTOBER 6-10, 2003. Ñ. 203. NIAZ I. NURGAZIZOV, ANASTAS A. BUKHARAEV, ROZA M.AMINOVA AND DENIS V.OVCHINNIKOV. INVESTIGATION OF DISSOLUTION PROCESS OF IMPLANTED SILICON DIOXIDE. PROCEEDINGS OF SPIE, MICRO- AND NANOELECTRONICS &NDASH;2003 , VOL. 5401, PP. 147-154 (2003).

Form of presentation

Articles in international journals and collections

Year of publication

2003

Authors, employees of KFU

Aminova Roza Mukhametovna, author

Bukharaev Anastas Akhmetovich, author

Bibliographic description in the original language

202. Niaz I. Nurgazizov, Anastas A. Bukharaev, Roza M.Aminova and Denis V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of International Conference “Micro- and Nanoelectronics - 2003” (ICMNE-2003), Zvenigorod, Moskow district, October 6-10, 2003. S. 203. Niaz I. Nurgazizov, Anastas A. Bukharaev, Roza M.Aminova and Denis V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of SPIE, Micro- and Nanoelectronics –2003 , vol. 5401, pp. 147-154 (2003).

Annotation

Proceedings of Spie

Keywords

äèîêñèä êðåìíèÿ, òåîðèÿ ôóíêöèîíàëà ïëîòíîñòè

The name of the journal

Proceedings of Spie

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=78899&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Aminova Roza Mukhametovna	ru_RU
dc.contributor.author	Bukharaev Anastas Akhmetovich	ru_RU
dc.date.accessioned	2003-01-01T00:00:00Z	ru_RU
dc.date.available	2003-01-01T00:00:00Z	ru_RU
dc.date.issued	2003	ru_RU
dc.identifier.citation	202. Niaz I. Nurgazizov, Anastas A. Bukharaev, Roza M.Aminova and Denis V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of International Conference “Micro- and Nanoelectronics - 2003” (ICMNE-2003), Zvenigorod, Moskow district, October 6-10, 2003. Ñ. 203. Niaz I. Nurgazizov, Anastas A. Bukharaev, Roza M.Aminova and Denis V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of SPIE, Micro- and Nanoelectronics –2003 , vol. 5401, pp. 147-154 (2003).	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=78899&p_lang=2	ru_RU
dc.description.abstract	Proceedings of Spie	ru_RU
dc.description.abstract	Proceedings of Spie	ru_RU
dc.description.abstract	Ìåòîäàìè êâàíòîâîé õèìèè èçó÷åíà ñòðóêòóðà èìïëàíòèðîâàííîãî äèîêñèäà êðåìíèÿ íà ïîâåðõíîñòè	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	äèîêñèä êðåìíèÿ	ru_RU
dc.subject	òåîðèÿ ôóíêöèîíàëà ïëîòíîñòè	ru_RU
dc.title	202. N.I. Nurgazizov, A.A. Bukharaev, Roza M.Aminova and D.V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of International Conference “Micro- and Nanoelectronics - 2003” (ICMNE-2003), Zvenigorod, Moskow district, October 6-10, 2003. Ñ. 203. Niaz I. Nurgazizov, Anastas A. Bukharaev, Roza M.Aminova and Denis V.Ovchinnikov. Investigation of dissolution process of implanted silicon dioxide. Proceedings of SPIE, Micro- and Nanoelectronics –2003 , vol. 5401, pp. 147-154 (2003).	ru_RU
dc.type	Articles in international journals and collections	ru_RU