KFU. Card publication. Intelligent control system îf metal vacuum sputtering process on the basis of application of multi-agent system.

KAZAN
FEDERAL UNIVERSITY

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INTELLIGENT CONTROL SYSTEM ÎF METAL VACUUM SPUTTERING PROCESS ON THE BASIS OF APPLICATION OF MULTI-AGENT SYSTEM.

Form of presentation

Articles in international journals and collections

Year of publication

2013

Authors, employees of KFU

Simonova Larisa Anatolevna, author

Other authors

Nugumanova A.I.; Chernova M.A.

Bibliographic description in the original language

L. Simonova. Intelligent control system of metal vacuum sputtering process on the basis of application of multi-agent system./L. Simonova, D. Israphilov, A. Nugimanova, M. Chernova// World Applied Sciences Journal. Volume 23 Number 7, 2013 926-929p. http://idosi.org/wasj/wasj23(7)13/9.pdf

Annotation

World Applied Sciences Journal

Keywords

vacuum sputtering process, inteligent control

The name of the journal

World Applied Sciences Journal

URL

http://www.idosi.org/wasj/wasj23(7)13/9.pdf

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=75011&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Simonova Larisa Anatolevna	ru_RU
dc.date.accessioned	2013-01-01T00:00:00Z	ru_RU
dc.date.available	2013-01-01T00:00:00Z	ru_RU
dc.date.issued	2013	ru_RU
dc.identifier.citation	L. Simonova. Intelligent control system îf metal vacuum sputtering process on the basis of application of multi-agent system./L. Simonova, D. Israphilov, A. Nugimanova, M. Chernova// World Applied Sciences Journal. Volume 23 Number 7, 2013 926-929p. http://idosi.org/wasj/wasj23(7)13/9.pdf	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=75011&p_lang=2	ru_RU
dc.description.abstract	World Applied Sciences Journal	ru_RU
dc.description.abstract	World Applied Sciences Journal	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	vacuum sputtering process	ru_RU
dc.subject	inteligent control	ru_RU
dc.title	Intelligent control system îf metal vacuum sputtering process on the basis of application of multi-agent system.	ru_RU
dc.type	Articles in international journals and collections	ru_RU