KFU. Card publication. Mathematical simulation of intelligent control system îf metal vacuum sputtering process on the basis of application of multi-agent system.

- RUS
- 中文
- ES

MATHEMATICAL SIMULATION OF INTELLIGENT CONTROL SYSTEM ÎF METAL VACUUM SPUTTERING PROCESS ON THE BASIS OF APPLICATION OF MULTI-AGENT SYSTEM.

Form of presentation

Articles in international journals and collections

Year of publication

2013

Authors, employees of KFU

Israfilov Irek Khusnemardanovich, author

Simonova Larisa Anatolevna, author

Other authors

Chernova M.A.

Bibliographic description in the original language

L. Simonova. Mathematical simulation of intelligent control system of metal vacuum sputtering process on the basis of application of multi-agent system /L. Simonova, D. Israphilov, I. Israphilov, M. Chernova // World Applied Sciences Journal. Volume 23 Number 7, 2013 930-934p. http://idosi.org/wasj/wasj23(7)13/10.pdf

Annotation

World Applied Sciences Journal

Keywords

vacuum sputtering sytem, inteligent control

The name of the journal

World Applied Sciences Journal

URL

http://www.idosi.org/wasj/wasj23(7)13/10.pdf

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=75009&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Israfilov Irek Khusnemardanovich	ru_RU
dc.contributor.author	Simonova Larisa Anatolevna	ru_RU
dc.date.accessioned	2013-01-01T00:00:00Z	ru_RU
dc.date.available	2013-01-01T00:00:00Z	ru_RU
dc.date.issued	2013	ru_RU
dc.identifier.citation	L. Simonova. Mathematical simulation of intelligent control system îf metal vacuum sputtering process on the basis of application of multi-agent system /L. Simonova, D. Israphilov, I. Israphilov, M. Chernova // World Applied Sciences Journal. Volume 23 Number 7, 2013 930-934p. http://idosi.org/wasj/wasj23(7)13/10.pdf	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=75009&p_lang=2	ru_RU
dc.description.abstract	World Applied Sciences Journal	ru_RU
dc.description.abstract	World Applied Sciences Journal	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	vacuum sputtering sytem	ru_RU
dc.subject	inteligent control	ru_RU
dc.title	Mathematical simulation of intelligent control system îf metal vacuum sputtering process on the basis of application of multi-agent system.	ru_RU
dc.type	Articles in international journals and collections	ru_RU