KFU. Card publication. Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach

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PREDICTION OF CHARACTERISTICS OF INDUCTIVE COUPLED RADIO FREQUENCY DISCHARGE AT LOW PRESSURE IN ONE-DIMENSIONAL APPROXIMATION USING NEURAL NETWORK APPROACH

Form of presentation

Articles in international journals and collections

Year of publication

2024

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Skvortsov I.V, Shemakhin A.Y, Danilov I.Y, Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach//High Energy Chemistry. - 2024. - Vol.58, Is.Suppl 3. - P.S421-S424.

Keywords

RF plasma, mathematical modeling, Neural Network

The name of the journal

HIGH ENERGY CHEMISTRY

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85213709637&doi=10.1134%2fS0018143924701273&partnerID=40&md5=57b91a187b9bdfa8bddc61a062f34503

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=312455&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2024-01-01T00:00:00Z	ru_RU
dc.date.available	2024-01-01T00:00:00Z	ru_RU
dc.date.issued	2024	ru_RU
dc.identifier.citation	Skvortsov I.V, Shemakhin A.Y, Danilov I.Y, Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach//High Energy Chemistry. - 2024. - Vol.58, Is.Suppl 3. - P.S421-S424.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=312455&p_lang=2	ru_RU
dc.description.abstract	HIGH ENERGY CHEMISTRY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.subject	Neural Network	ru_RU
dc.title	Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach	ru_RU
dc.type	Articles in international journals and collections	ru_RU