KFU. Card publication. A Two-Dimensional Axisymmetric Model for the Low Pressure Inductively Coupled RF Plasma with Gas Flow

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FEDERAL UNIVERSITY

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A TWO-DIMENSIONAL AXISYMMETRIC MODEL FOR THE LOW PRESSURE INDUCTIVELY COUPLED RF PLASMA WITH GAS FLOW

Form of presentation

Articles in international journals and collections

Year of publication

2024

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Samsonova E.S, Zheltukhin V.S, Shemakhin A.Y, A Two-Dimensional Axisymmetric Model for the Low Pressure Inductively Coupled RF Plasma with Gas Flow//High Energy Chemistry. - 2024. - Vol.58, Is.Suppl 3. - P.S393-S399.

Keywords

RF plasma, mathematical modeling

The name of the journal

HIGH ENERGY CHEMISTRY

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85213680701&doi=10.1134%2fS0018143924701224&partnerID=40&md5=fddfead90cad8ebef79203771c997787

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=312453&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2024-01-01T00:00:00Z	ru_RU
dc.date.available	2024-01-01T00:00:00Z	ru_RU
dc.date.issued	2024	ru_RU
dc.identifier.citation	Samsonova E.S, Zheltukhin V.S, Shemakhin A.Y, A Two-Dimensional Axisymmetric Model for the Low Pressure Inductively Coupled RF Plasma with Gas Flow//High Energy Chemistry. - 2024. - Vol.58, Is.Suppl 3. - P.S393-S399.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=312453&p_lang=2	ru_RU
dc.description.abstract	HIGH ENERGY CHEMISTRY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.title	A Two-Dimensional Axisymmetric Model for the Low Pressure Inductively Coupled RF Plasma with Gas Flow	ru_RU
dc.type	Articles in international journals and collections	ru_RU