KFU. Card publication. Prediction of characteristics of inductive coupled radio frequency discharge at low pressure in one-dimensional approximation using neural network approach

- RUS
- 中文
- ES

PREDICTION OF CHARACTERISTICS OF INDUCTIVE COUPLED RADIO FREQUENCY DISCHARGE AT LOW PRESSURE IN ONE-DIMENSIONAL APPROXIMATION USING NEURAL NETWORK APPROACH

Form of presentation

Articles in Russian journals and collections

Year of publication

2024

��

��

Authors, employees of KFU

Skvorcov Ilya Vyacheslavovich, author

Shemakhin Aleksandr Yurevich, author

Other authors

Gaskova Darya , author

Bibliographic description in the original language

I.V. Skvortsov. Prediction of characteristics of inductive coupled radio frequency discharge at low pressure in one-dimensional approximation using neural network approach / I.V. Skvortsov, A.Y. Shemakhin, I.Y.Danilov, D.A. Gaskova // High Energy Chemistry. - 2024. - Vol. 58, Suppl. 3.

Keywords

ICRF discharge, neural network

The name of the journal

HIGH ENERGY CHEMISTRY

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=307353&p_lang=2

Resource files

File name

Size (MB)

Format

Full metadata record

Field DC	Value	Language
dc.contributor.author	Skvorcov Ilya Vyacheslavovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Gaskova Darya	ru_RU
dc.date.accessioned	2024-01-01T00:00:00Z	ru_RU
dc.date.available	2024-01-01T00:00:00Z	ru_RU
dc.date.issued	2024	ru_RU
dc.identifier.citation	I.V. Skvortsov. Prediction of characteristics of inductive coupled radio frequency discharge at low pressure in one-dimensional approximation using neural network approach / I.V. Skvortsov, A.Y. Shemakhin, I.Y.Danilov, D.A. Gaskova // High Energy Chemistry. - 2024. - Vol. 58, Suppl. 3.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=307353&p_lang=2	ru_RU
dc.description.abstract	HIGH ENERGY CHEMISTRY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	ICRF discharge	ru_RU
dc.subject	neural network	ru_RU
dc.title	Prediction of characteristics of inductive coupled radio frequency discharge at low pressure in one-dimensional approximation using neural network approach	ru_RU
dc.type	Articles in Russian journals and collections	ru_RU