KFU. Card publication. Research of plasma impact on migration of silicon in ceramic substrates prepared on the basis of MgO

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

RESEARCH OF PLASMA IMPACT ON MIGRATION OF SILICON IN CERAMIC SUBSTRATES PREPARED ON THE BASIS OF MGO

Form of presentation

Articles in international journals and collections

Year of publication

2019

��

��

Authors, employees of KFU

Kashapov Nail Faikovich, author

Bibliographic description in the original language

Kaleeva A.A, Dautov I.G, Kashapov N.F, Research of plasma impact on migration of silicon in ceramic substrates prepared on the basis of MgO//Journal of Physics: Conference Series. - 2019. - Vol.1328, Is.1. - Art. � 012030.

Keywords

MgO

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85076209295&doi=10.1088%2f1742-6596%2f1328%2f1%2f012030&partnerID=40&md5=372a1fbbc5d3ac235986d884d67506f8

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=301816&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Kashapov Nail Faikovich	ru_RU
dc.date.accessioned	2019-01-01T00:00:00Z	ru_RU
dc.date.available	2019-01-01T00:00:00Z	ru_RU
dc.date.issued	2019	ru_RU
dc.identifier.citation	Kaleeva A.A, Dautov I.G, Kashapov N.F, Research of plasma impact on migration of silicon in ceramic substrates prepared on the basis of MgO//Journal of Physics: Conference Series. - 2019. - Vol.1328, Is.1. - Art. � 012030.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=301816&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Research of plasma impact on migration of silicon in ceramic substrates prepared on the basis of MgO	ru_RU
dc.type	Articles in international journals and collections	ru_RU