KFU. Card publication. XIII Scientific Technical Conference on Low Temperature Plasma during the Deposition of Functional Coatings

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

XIII SCIENTIFIC TECHNICAL CONFERENCE ON LOW TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS

Form of presentation

Articles in international journals and collections

Year of publication

2022

��

��

Authors, employees of KFU

Kashapov Nail Faikovich, author

Bibliographic description in the original language

Kashapov N.F, Luchkin A.G., XIII Scientific Technical Conference on Low Temperature Plasma during the Deposition of Functional Coatings//Journal of Physics: Conference Series. - 2022. - Vol.2379, Is.1. - Art. �011001.

Keywords

Low Temperature Plasma

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145168680&doi=10.1088%2f1742-6596%2f2379%2f1%2f011001&partnerID=40&md5=db73919ae571e954c93b81660bf7e69f

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=301807&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Kashapov Nail Faikovich	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Kashapov N.F, Luchkin A.G., XIII Scientific Technical Conference on Low Temperature Plasma during the Deposition of Functional Coatings//Journal of Physics: Conference Series. - 2022. - Vol.2379, Is.1. - Art. �011001.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=301807&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	XIII Scientific Technical Conference on Low Temperature Plasma during the Deposition of Functional Coatings	ru_RU
dc.type	Articles in international journals and collections	ru_RU