KFU. Card publication. Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow

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FEDERAL UNIVERSITY

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SIMULATION OF LOW-PRESSURE INDUCTIVELY COUPLED PLASMA WITH DISPLACEMENT POTENTIAL AND GAS FLOW

Form of presentation

Articles in international journals and collections

Year of publication

2024

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Y., Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow//Plasma Physics Reports. - 2024. - Vol.50, Is.1. - P.89-100.

Keywords

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The name of the journal

Plasma Physics Reports

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85190517291&doi=10.1134%2fS1063780X23601694&partnerID=40&md5=41802590a782cf9f5ea51fac069db9c3

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=299280&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2024-01-01T00:00:00Z	ru_RU
dc.date.available	2024-01-01T00:00:00Z	ru_RU
dc.date.issued	2024	ru_RU
dc.identifier.citation	Shemakhin A.Y., Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow//Plasma Physics Reports. - 2024. - Vol.50, Is.1. - P.89-100.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=299280&p_lang=2	ru_RU
dc.description.abstract	Plasma Physics Reports	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	��-��	ru_RU
dc.subject	��	ru_RU
dc.subject	��	ru_RU
dc.title	Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow	ru_RU
dc.type	Articles in international journals and collections	ru_RU