KFU. Card publication. Measuring the thickness of thin metal films using an eddy current software and hardware complex

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

MEASURING THE THICKNESS OF THIN METAL FILMS USING AN EDDY CURRENT SOFTWARE AND HARDWARE COMPLEX

Form of presentation

Articles in international journals and collections

Year of publication

2024

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Authors, employees of KFU

Akhmetshin Stanislav Dinarovich, author

Voynash Sergey Aleksandrovich, author

Zagidullin Ramil Ravilevich, author

Bibliographic description in the original language

Katasonov A., Malikov V., Voinash S., Vornacheva I., Zagidullin R., Akhmetshin S. Measuring the thickness of thin metal films using an eddy current software and hardware complex//Proceedings of SPIE - The International Society for Optical Engineering. - 2024. - Vol.12986, Is.. - Art. �1298608.

Keywords

thin metal films, film thickness, eddy current transducer, signal level, signal dependence

The name of the journal

Proceedings of SPIE - The International Society for Optical Engineering

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85184290833&doi=10.1117%2f12.3016516&partnerID=40&md5=df7989cd9730aa53d2f43f28fdc945b3

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=295942&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Akhmetshin Stanislav Dinarovich	ru_RU
dc.contributor.author	Voynash Sergey Aleksandrovich	ru_RU
dc.contributor.author	Zagidullin Ramil Ravilevich	ru_RU
dc.date.accessioned	2024-01-01T00:00:00Z	ru_RU
dc.date.available	2024-01-01T00:00:00Z	ru_RU
dc.date.issued	2024	ru_RU
dc.identifier.citation	Katasonov A., Malikov V., Voinash S., Vornacheva I., Zagidullin R., Akhmetshin S. Measuring the thickness of thin metal films using an eddy current software and hardware complex//Proceedings of SPIE - The International Society for Optical Engineering. - 2024. - Vol.12986, Is.. - Art. �1298608.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=295942&p_lang=2	ru_RU
dc.description.abstract	Proceedings of SPIE - The International Society for Optical Engineering	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	thin metal films	ru_RU
dc.subject	film thickness	ru_RU
dc.subject	eddy current transducer	ru_RU
dc.subject	signal level	ru_RU
dc.subject	signal dependence	ru_RU
dc.title	Measuring the thickness of thin metal films using an eddy current software and hardware complex	ru_RU
dc.type	Articles in international journals and collections	ru_RU