Form of presentation | Articles in international journals and collections |
Year of publication | 2024 |
Язык | английский |
|
Akhmetshin Stanislav Dinarovich, author
Voynash Sergey Aleksandrovich, author
Zagidullin Ramil Ravilevich, author
|
Bibliographic description in the original language |
Katasonov A., Malikov V., Voinash S., Vornacheva I., Zagidullin R., Akhmetshin S. Measuring the thickness of thin metal films using an eddy current software and hardware complex//Proceedings of SPIE - The International Society for Optical Engineering. - 2024. - Vol.12986, Is.. - Art. №1298608. |
Keywords |
thin metal films, film thickness, eddy current transducer, signal level, signal dependence |
The name of the journal |
Proceedings of SPIE - The International Society for Optical Engineering
|
URL |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85184290833&doi=10.1117%2f12.3016516&partnerID=40&md5=df7989cd9730aa53d2f43f28fdc945b3 |
Please use this ID to quote from or refer to the card |
https://repository.kpfu.ru/eng/?p_id=295942&p_lang=2 |
Full metadata record ![](https://shelly.kpfu.ru/pdf/picture/arrow_black_right.gif) |
Field DC |
Value |
Language |
dc.contributor.author |
Akhmetshin Stanislav Dinarovich |
ru_RU |
dc.contributor.author |
Voynash Sergey Aleksandrovich |
ru_RU |
dc.contributor.author |
Zagidullin Ramil Ravilevich |
ru_RU |
dc.date.accessioned |
2024-01-01T00:00:00Z |
ru_RU |
dc.date.available |
2024-01-01T00:00:00Z |
ru_RU |
dc.date.issued |
2024 |
ru_RU |
dc.identifier.citation |
Katasonov A., Malikov V., Voinash S., Vornacheva I., Zagidullin R., Akhmetshin S. Measuring the thickness of thin metal films using an eddy current software and hardware complex//Proceedings of SPIE - The International Society for Optical Engineering. - 2024. - Vol.12986, Is.. - Art. №1298608. |
ru_RU |
dc.identifier.uri |
https://repository.kpfu.ru/eng/?p_id=295942&p_lang=2 |
ru_RU |
dc.description.abstract |
Proceedings of SPIE - The International Society for Optical Engineering |
ru_RU |
dc.language.iso |
ru |
ru_RU |
dc.subject |
thin metal films |
ru_RU |
dc.subject |
film thickness |
ru_RU |
dc.subject |
eddy current transducer |
ru_RU |
dc.subject |
signal level |
ru_RU |
dc.subject |
signal dependence |
ru_RU |
dc.title |
Measuring the thickness of thin metal films using an eddy current software and hardware complex |
ru_RU |
dc.type |
Articles in international journals and collections |
ru_RU |
|