KFU. Card publication. Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge

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INVESTIGATION OF THE DISCHARGE CHAMBER EXPANSION REGION INFLUENCE ON THE ELECTRON DENSITY IN AN INDUCTIVELY COUPLED RF DISCHARGE

Form of presentation

Articles in international journals and collections

Year of publication

2023

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Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Y, Zheltukhin V.S, Kiselev G.B, Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge//High Energy Chemistry. - 2023. - Vol.57, Is.. - P.S227-S233.

Keywords

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The name of the journal

HIGH ENERGY CHEMISTRY

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85170403774&doi=10.1134%2fS0018143923070445&partnerID=40&md5=5bac394edb22d013b555a64d10758e57

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=287195&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2023-01-01T00:00:00Z	ru_RU
dc.date.available	2023-01-01T00:00:00Z	ru_RU
dc.date.issued	2023	ru_RU
dc.identifier.citation	Shemakhin A.Y, Zheltukhin V.S, Kiselev G.B, Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge//High Energy Chemistry. - 2023. - Vol.57, Is.. - P.S227-S233.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=287195&p_lang=2	ru_RU
dc.description.abstract	HIGH ENERGY CHEMISTRY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	��-��	ru_RU
dc.subject	��	ru_RU
dc.title	Investigation of the Discharge Chamber Expansion Region Influence on the Electron Density in an Inductively Coupled RF Discharge	ru_RU
dc.type	Articles in international journals and collections	ru_RU