| Form of presentation | Articles in international journals and collections |
| Year of publication | 2022 |
| Язык | английский |
|
Shemakhin Aleksandr Yurevich, author
|
| Bibliographic description in the original language |
Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem//Journal of Physics: Conference Series. - 2022. - Vol.2388, Is.1. - Art. №012050. |
| Keywords |
ВЧ-плазма, пониженное давление, математическое моделирование |
| The name of the journal |
Journal of Physics: Conference Series
|
| URL |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145185510&doi=10.1088%2f1742-6596%2f2388%2f1%2f012050&partnerID=40&md5=bf383da4792f8695fb1b56e058e07102 |
| Please use this ID to quote from or refer to the card |
https://repository.kpfu.ru/eng/?p_id=278829&p_lang=2 |
Full metadata record  |
| Field DC |
Value |
Language |
| dc.contributor.author |
Shemakhin Aleksandr Yurevich |
ru_RU |
| dc.date.accessioned |
2022-01-01T00:00:00Z |
ru_RU |
| dc.date.available |
2022-01-01T00:00:00Z |
ru_RU |
| dc.date.issued |
2022 |
ru_RU |
| dc.identifier.citation |
Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem//Journal of Physics: Conference Series. - 2022. - Vol.2388, Is.1. - Art. №012050. |
ru_RU |
| dc.identifier.uri |
https://repository.kpfu.ru/eng/?p_id=278829&p_lang=2 |
ru_RU |
| dc.description.abstract |
Journal of Physics: Conference Series |
ru_RU |
| dc.language.iso |
ru |
ru_RU |
| dc.subject |
ВЧ-плазма |
ru_RU |
| dc.subject |
пониженное давление |
ru_RU |
| dc.subject |
математическое моделирование |
ru_RU |
| dc.title |
A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem |
ru_RU |
| dc.type |
Articles in international journals and collections |
ru_RU |
|
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