KFU. Card publication. Self-Consistent Model of Low Pressure Inductively Coupled RF Discharge

KAZAN
FEDERAL UNIVERSITY

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- 中文
- ES

SELF-CONSISTENT MODEL OF LOW PRESSURE INDUCTIVELY COUPLED RF DISCHARGE

Form of presentation

Articles in international journals and collections

Year of publication

2022

Язык

английский

Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Zheltukhin V, Shemakhin A, Terentev T, Self-Consistent Model of Low Pressure Inductively Coupled RF Discharge//Lecture Notes in Computational Science and Engineering. - 2022. - Vol.141, Is.. - P.587-595.

Keywords

RF plasma, low pressure

The name of the journal

Lecture Notes in Computational Science and Engineering

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85138828826&doi=10.1007%2f978-3-030-87809-2_44&partnerID=40&md5=055bc60c46f6b7d6c13ddbada90e6e12

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=273922&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Zheltukhin V, Shemakhin A, Terentev T, Self-Consistent Model of Low Pressure Inductively Coupled RF Discharge//Lecture Notes in Computational Science and Engineering. - 2022. - Vol.141, Is.. - P.587-595.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=273922&p_lang=2	ru_RU
dc.description.abstract	Lecture Notes in Computational Science and Engineering	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.title	Self-Consistent Model of Low Pressure Inductively Coupled RF Discharge	ru_RU
dc.type	Articles in international journals and collections	ru_RU