KFU. Card publication. Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure

KAZAN
FEDERAL UNIVERSITY

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FREQUENCY DEPENDENCIES OF THE CHARACTERISTICS OF AN INDUCTIVELY COUPLED RADIOFREQUENCY DISCHARGE AT REDUCED PRESSURE

Form of presentation

Articles in international journals and collections

Year of publication

2022

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Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Terentev TN, Shemakhin AY, Samsonova ES, Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure//PLASMA SOURCES SCIENCE & TECHNOLOGY. - 2022. - Vol.31, Is.9. - Art. �94005.

Keywords

ICRF discharge, RF plasma, reduced pressure, mathematical modeling

The name of the journal

PLASMA SOURCES SCIENCE & TECHNOLOGY

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=272462&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Terentev TN, Shemakhin AY, Samsonova ES, Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure//PLASMA SOURCES SCIENCE & TECHNOLOGY. - 2022. - Vol.31, Is.9. - Art. �94005.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=272462&p_lang=2	ru_RU
dc.description.abstract	PLASMA SOURCES SCIENCE & TECHNOLOGY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	ICRF discharge	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	reduced pressure	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.title	Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure	ru_RU
dc.type	Articles in international journals and collections	ru_RU