KFU. Card publication. Application of the Harrington function in substantiating the choice of the best equipment for plasma processing of materials

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APPLICATION OF THE HARRINGTON FUNCTION IN SUBSTANTIATING THE CHOICE OF THE BEST EQUIPMENT FOR PLASMA PROCESSING OF MATERIALS

Form of presentation

Articles in international journals and collections

Year of publication

2022

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Authors, employees of KFU

Tazmeev Gayaz Kharisovich, author

Tazmeeva Ramilya Nuriakhmetovna, author

Bibliographic description in the original language

Tazmeev B.K, Tsybulevsky V.V, Tazmeeva R.N, Application of the Harrington function in substantiating the choice of the best equipment for plasma processing of materials//Journal of Physics: Conference Series. - 2022. - Vol.2270, Is.1. - Art. �012013.

Keywords

low current plasma

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85131855051&doi=10.1088%2f1742-6596%2f2270%2f1%2f012013&partnerID=40&md5=59d53fbc27b0431e809c8e92f4f365b9

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=270989&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Tazmeev Gayaz Kharisovich	ru_RU
dc.contributor.author	Tazmeeva Ramilya Nuriakhmetovna	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Tazmeev B.K, Tsybulevsky V.V, Tazmeeva R.N, Application of the Harrington function in substantiating the choice of the best equipment for plasma processing of materials//Journal of Physics: Conference Series. - 2022. - Vol.2270, Is.1. - Art. �012013.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=270989&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Application of the Harrington function in substantiating the choice of the best equipment for plasma processing of materials	ru_RU
dc.type	Articles in international journals and collections	ru_RU