KFU. Card publication. About enhance the functionality of microelectromechanical system

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

ABOUT ENHANCE THE FUNCTIONALITY OF MICROELECTROMECHANICAL SYSTEM

Form of presentation

Articles in international journals and collections

Year of publication

2022

Язык

английский

Authors, employees of KFU

Bakhtieva Lyalya Uzbekovna, author

Bibliographic description in the original language

Bogolyubov V.M., Bakhtieva L.U. About enhance the functionality of microelectromechanical system // AIP Conference Proceedings. - 2022. - Vol. 2383, Art. №050004. https://doi.org/10.1063/5.0074482

Keywords

MEMS

The name of the journal

AIP Conference Proceedings

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85129819278&doi=10.1063%2f5.0074482&partnerID=40&md5=d7f87fc7aa8e739479325ff165404f0c

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=266776&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Bakhtieva Lyalya Uzbekovna	ru_RU
dc.date.accessioned	2022-01-01T00:00:00Z	ru_RU
dc.date.available	2022-01-01T00:00:00Z	ru_RU
dc.date.issued	2022	ru_RU
dc.identifier.citation	Bogolyubov V.M., Bakhtieva L.U. About enhance the functionality of microelectromechanical system // AIP Conference Proceedings. - 2022. - Vol. 2383, Art. №050004. https://doi.org/10.1063/5.0074482	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=266776&p_lang=2	ru_RU
dc.description.abstract	AIP Conference Proceedings	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	About enhance the functionality of microelectromechanical system	ru_RU
dc.type	Articles in international journals and collections	ru_RU