KFU. Card publication. Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions

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MOLECULAR DYNAMICS SIMULATION OF COPPER NANOFILM SELF-ASSEMBLY ON SILICON SUBSTRATE UNDER GAS-DISCHARGE PLASMA CONDITIONS

Form of presentation

Articles in international journals and collections

Year of publication

2021

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Authors, employees of KFU

Fayrushin Ilnaz Izailovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Fairushin I.I, Shemakhin A.Y, Khabir?yanova A.A., Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions//High Energy Chemistry. - 2021. - Vol.55, Is.5. - P.399-401.

Keywords

gas discharge, molecular dynamics, sputtering, copper nanofilm, self-assembly

The name of the journal

HIGH ENERGY CHEMISTRY

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115357777&doi=10.1134%2fS0018143921050039&partnerID=40&md5=d2ffb8a499711856c9978d981af0e6eb

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=258428&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Fayrushin Ilnaz Izailovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2021-01-01T00:00:00Z	ru_RU
dc.date.available	2021-01-01T00:00:00Z	ru_RU
dc.date.issued	2021	ru_RU
dc.identifier.citation	Fairushin I.I, Shemakhin A.Y, Khabir?yanova A.A., Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions//High Energy Chemistry. - 2021. - Vol.55, Is.5. - P.399-401.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=258428&p_lang=2	ru_RU
dc.description.abstract	HIGH ENERGY CHEMISTRY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	gas discharge	ru_RU
dc.subject	molecular dynamics	ru_RU
dc.subject	sputtering	ru_RU
dc.subject	copper nanofilm	ru_RU
dc.subject	self-assembly	ru_RU
dc.title	Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions	ru_RU
dc.type	Articles in international journals and collections	ru_RU