KFU. Card publication. Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions

- RUS
- 中文
- ES

MOLECULAR DYNAMICS SIMULATION OF COPPER NANOFILM SELF-ASSEMBLY ON SILICON SUBSTRATE UNDER GAS-DISCHARGE PLASMA CONDITIONS

Form of presentation

Articles in international journals and collections

Year of publication

2021

��

��

Authors, employees of KFU

Fayrushin Ilnaz Izailovich, author

Shemakhin Aleksandr Yurevich, author

Other authors

Khabiryanova Aliya Ayratovna, author

Bibliographic description in the original language

Fairushin I.I. Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions / I.I. Fairushin, A.Yu. Shemakhin, A.A. Khabir'yanova // High Energy Chemistry. - 2021. - vol. 55, Issue 5. - pp. 399-401

Keywords

gas discharge, molecular dynamics, sputtering, copper nanofilm, self-assembly

The name of the journal

HIGH ENERGY CHEMISTRY

URL

https://link.springer.com/article/10.1134/S0018143921050039

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=256782&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Fayrushin Ilnaz Izailovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Khabiryanova Aliya Ayratovna	ru_RU
dc.date.accessioned	2021-01-01T00:00:00Z	ru_RU
dc.date.available	2021-01-01T00:00:00Z	ru_RU
dc.date.issued	2021	ru_RU
dc.identifier.citation	Fairushin I.I. Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions / I.I. Fairushin, A.Yu. Shemakhin, A.A. Khabir'yanova // High Energy Chemistry. - 2021. - vol. 55, Issue 5. - pp. 399-401	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=256782&p_lang=2	ru_RU
dc.description.abstract	HIGH ENERGY CHEMISTRY	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	gas discharge	ru_RU
dc.subject	molecular dynamics	ru_RU
dc.subject	sputtering	ru_RU
dc.subject	copper nanofilm	ru_RU
dc.subject	self-assembly	ru_RU
dc.title	Molecular Dynamics Simulation of Copper Nanofilm Self-Assembly on Silicon Substrate under Gas-Discharge Plasma Conditions	ru_RU
dc.type	Articles in international journals and collections	ru_RU