KFU. Card publication. Mathematical modeling of rf plasma flow at low pressures in vacuum chamber with charged body

KAZAN
FEDERAL UNIVERSITY

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MATHEMATICAL MODELING OF RF PLASMA FLOW AT LOW PRESSURES IN VACUUM CHAMBER WITH CHARGED BODY

Form of presentation

Conference proceedings in Russian journals and collections

Year of publication

2021

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin Aleksandr. Mathematical modeling of rf plasma flow at low pressures in vacuum chamber with charged body // Proceedings & programme of the International workshop IWCI-2021 - C. 68

Annotation

Proceedings & programme of the International workshop IWCI-2021

Keywords

RF plasma, charged body, mathematical modelling, low pressure

The name of the journal

Proceedings & programme of the International workshop IWCI-2021

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=251405&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2021-01-01T00:00:00Z	ru_RU
dc.date.available	2021-01-01T00:00:00Z	ru_RU
dc.date.issued	2021	ru_RU
dc.identifier.citation	Shemakhin Aleksandr. Mathematical modeling of rf plasma flow at low pressures in vacuum chamber with charged body // Proceedings & programme of the International workshop IWCI-2021 - C. 68	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=251405&p_lang=2	ru_RU
dc.description.abstract	Proceedings & programme of the International workshop IWCI-2021	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	charged body	ru_RU
dc.subject	mathematical modelling	ru_RU
dc.subject	low pressure	ru_RU
dc.title	Mathematical modeling of rf plasma flow at low pressures in vacuum chamber with charged body	ru_RU
dc.type	Conference proceedings in Russian journals and collections	ru_RU