KFU. Card publication. Incoherent-light pulse annealing of nanoporous germanium layers formed by ion implantation

KAZAN
FEDERAL UNIVERSITY

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- 中文
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INCOHERENT-LIGHT PULSE ANNEALING OF NANOPOROUS GERMANIUM LAYERS FORMED BY ION IMPLANTATION

Form of presentation

Articles in international journals and collections

Year of publication

2021

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Authors, employees of KFU

Rogov Aleksey Mikhaylovich, author

Bibliographic description in the original language

Stepanov A.L, Farrakhov B.F, Fattakhov Y.V, Incoherent-light pulse annealing of nanoporous germanium layers formed by ion implantation//Vacuum. - 2021. - Vol.186, Is.. - Art. � 110060.

Keywords

annealing, semiconductors, implantation

The name of the journal

Vacuum

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099635481&doi=10.1016%2fj.vacuum.2021.110060&partnerID=40&md5=64fb655642977fa64d26728b803ceec8

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=249264&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Rogov Aleksey Mikhaylovich	ru_RU
dc.date.accessioned	2021-01-01T00:00:00Z	ru_RU
dc.date.available	2021-01-01T00:00:00Z	ru_RU
dc.date.issued	2021	ru_RU
dc.identifier.citation	Stepanov A.L, Farrakhov B.F, Fattakhov Y.V, Incoherent-light pulse annealing of nanoporous germanium layers formed by ion implantation//Vacuum. - 2021. - Vol.186, Is.. - Art. � 110060.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=249264&p_lang=2	ru_RU
dc.description.abstract	Vacuum	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	annealing	ru_RU
dc.subject	semiconductors	ru_RU
dc.subject	implantation	ru_RU
dc.title	Incoherent-light pulse annealing of nanoporous germanium layers formed by ion implantation	ru_RU
dc.type	Articles in international journals and collections	ru_RU