KFU. Card publication. Study of RF plasma flow at low pressure: Electron temperature influence

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

STUDY OF RF PLASMA FLOW AT LOW PRESSURE: ELECTRON TEMPERATURE INFLUENCE

Form of presentation

Articles in international journals and collections

Year of publication

2020

Язык

английский

Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, Study of RF plasma flow at low pressure: Electron temperature influence//Journal of Physics: Conference Series. - 2020. - Vol.1588, Is.1. - Art. № 012062.

Keywords

RF plasma, low pressure,electron temperature

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85090781521&doi=10.1088%2f1742-6596%2f1588%2f1%2f012062&partnerID=40&md5=b5f3988d3ab9930eeb70349f7d19e194

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=238997&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2020-01-01T00:00:00Z	ru_RU
dc.date.available	2020-01-01T00:00:00Z	ru_RU
dc.date.issued	2020	ru_RU
dc.identifier.citation	Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, Study of RF plasma flow at low pressure: Electron temperature influence//Journal of Physics: Conference Series. - 2020. - Vol.1588, Is.1. - Art. № 012062.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=238997&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	electron temperature	ru_RU
dc.title	Study of RF plasma flow at low pressure: Electron temperature influence	ru_RU
dc.type	Articles in international journals and collections	ru_RU