| Form of presentation | Articles in international journals and collections |
| Year of publication | 2020 |
| Язык | английский |
|
Zheltukhin Viktor Semenovich, author
Shemakhin Aleksandr Yurevich, author
|
| Bibliographic description in the original language |
Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization//Journal of Physics: Conference Series. - 2020. - Vol.1588, Is.1. - Art. № 012018. |
| Keywords |
RF plasma, low pressure, plasma flow |
| The name of the journal |
Journal of Physics: Conference Series
|
| URL |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85090792814&doi=10.1088%2f1742-6596%2f1588%2f1%2f012018&partnerID=40&md5=e2e3cc200167bfecf428d1f4ebeaf97c |
| Please use this ID to quote from or refer to the card |
https://repository.kpfu.ru/eng/?p_id=238996&p_lang=2 |
Full metadata record  |
| Field DC |
Value |
Language |
| dc.contributor.author |
Zheltukhin Viktor Semenovich |
ru_RU |
| dc.contributor.author |
Shemakhin Aleksandr Yurevich |
ru_RU |
| dc.date.accessioned |
2020-01-01T00:00:00Z |
ru_RU |
| dc.date.available |
2020-01-01T00:00:00Z |
ru_RU |
| dc.date.issued |
2020 |
ru_RU |
| dc.identifier.citation |
Shemakhin A.Yu, Zheltukhin V.S, Shemakhin E.Yu, Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization//Journal of Physics: Conference Series. - 2020. - Vol.1588, Is.1. - Art. № 012018. |
ru_RU |
| dc.identifier.uri |
https://repository.kpfu.ru/eng/?p_id=238996&p_lang=2 |
ru_RU |
| dc.description.abstract |
Journal of Physics: Conference Series |
ru_RU |
| dc.language.iso |
ru |
ru_RU |
| dc.subject |
RF plasma |
ru_RU |
| dc.subject |
low pressure |
ru_RU |
| dc.subject |
plasma flow |
ru_RU |
| dc.title |
Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization |
ru_RU |
| dc.type |
Articles in international journals and collections |
ru_RU |
|
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