KFU. Card publication. Diffraction grating on chalcogenide glass (GeSe5)80B20 fabricated by mask ion implantation

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DIFFRACTION GRATING ON CHALCOGENIDE GLASS (GESE5)80B20 FABRICATED BY MASK ION IMPLANTATION

Form of presentation

Articles in international journals and collections

Year of publication

2020

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Authors, employees of KFU

Rogov Aleksey Mikhaylovich, author

Bibliographic description in the original language

Stepanov A.L, Rogov A.M, Nuzhdin V.I, Diffraction grating on chalcogenide glass (GeSe5)80B20 fabricated by mask ion implantation//Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. - 2020. - Vol.462, Is.. - P.187-190.

Keywords

ion implantation, semiconductors, microscopy

The name of the journal

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85075628863&doi=10.1016%2fj.nimb.2019.09.027&partnerID=40&md5=563b6376acd1cb5633f001e3c9444fd0

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=236952&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Rogov Aleksey Mikhaylovich	ru_RU
dc.date.accessioned	2020-01-01T00:00:00Z	ru_RU
dc.date.available	2020-01-01T00:00:00Z	ru_RU
dc.date.issued	2020	ru_RU
dc.identifier.citation	Stepanov A.L, Rogov A.M, Nuzhdin V.I, Diffraction grating on chalcogenide glass (GeSe5)80B20 fabricated by mask ion implantation//Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. - 2020. - Vol.462, Is.. - P.187-190.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=236952&p_lang=2	ru_RU
dc.description.abstract	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	ion implantation	ru_RU
dc.subject	semiconductors	ru_RU
dc.subject	microscopy	ru_RU
dc.title	Diffraction grating on chalcogenide glass (GeSe5)80B20 fabricated by mask ion implantation	ru_RU
dc.type	Articles in international journals and collections	ru_RU