KFU. Card publication. Mathematical modeling of radio-frequency plasma flow at low pressures in nonlocal approximation

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

MATHEMATICAL MODELING OF RADIO-FREQUENCY PLASMA FLOW AT LOW PRESSURES IN NONLOCAL APPROXIMATION

Form of presentation

Conference proceedings in Russian journals and collections

Year of publication

2020

��

��

Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A. Yu. , Zheltukhin V. S. Mathematical modeling of radio-frequency plasma flow at low pressures in nonlocal approximation// Sbornik tezisov XXXV Mezhdunarodnoy konferencii «Uravneniya sostoyaniya veshhestva«, 2020, S. 250.

Annotation

�� XXXV �� «�� «

Keywords

RF plasma, mathematical modelling, low pressures

The name of the journal

�� XXXV �� «�� «

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=234714&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2020-01-01T00:00:00Z	ru_RU
dc.date.available	2020-01-01T00:00:00Z	ru_RU
dc.date.issued	2020	ru_RU
dc.identifier.citation	Shemakhin A. Yu. , Zheltukhin V. S. Mathematical modeling of radio-frequency plasma flow at low pressures in nonlocal approximation// �� XXXV �� «�� «, 2020, �. 250.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=234714&p_lang=2	ru_RU
dc.description.abstract	�� XXXV �� «�� «	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF plasma	ru_RU
dc.subject	mathematical modelling	ru_RU
dc.subject	low pressures	ru_RU
dc.title	Mathematical modeling of radio-frequency plasma flow at low pressures in nonlocal approximation	ru_RU
dc.type	Conference proceedings in Russian journals and collections	ru_RU