KFU. Card publication. New approach to create a counting grid by ion-mask implantation for analysis of small biological objects

KAZAN
FEDERAL UNIVERSITY

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NEW APPROACH TO CREATE A COUNTING GRID BY ION-MASK IMPLANTATION FOR ANALYSIS OF SMALL BIOLOGICAL OBJECTS

Form of presentation

Articles in international journals and collections

Year of publication

2019

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Authors, employees of KFU

Evtyugin Vladimir Gennadevich, author

Rogov Aleksey Mikhaylovich, author

Bibliographic description in the original language

Evtugin V.G, Rogov A.M, Nuzhdin V.I, New approach to create a counting grid by ion-mask implantation for analysis of small biological objects//Vacuum. - 2019. - Vol.165, Is.. - P.320-323.

Keywords

grid, ion-mask implantation

The name of the journal

Vacuum

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85064641894&doi=10.1016%2fj.vacuum.2019.04.044&partnerID=40&md5=4a54e97ac539b3c36c55ab4474779ff7

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=210606&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Evtyugin Vladimir Gennadevich	ru_RU
dc.contributor.author	Rogov Aleksey Mikhaylovich	ru_RU
dc.date.accessioned	2019-01-01T00:00:00Z	ru_RU
dc.date.available	2019-01-01T00:00:00Z	ru_RU
dc.date.issued	2019	ru_RU
dc.identifier.citation	Evtugin V.G, Rogov A.M, Nuzhdin V.I, New approach to create a counting grid by ion-mask implantation for analysis of small biological objects//Vacuum. - 2019. - Vol.165, Is.. - P.320-323.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=210606&p_lang=2	ru_RU
dc.description.abstract	Vacuum	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	grid	ru_RU
dc.subject	ion-mask implantation	ru_RU
dc.title	New approach to create a counting grid by ion-mask implantation for analysis of small biological objects	ru_RU
dc.type	Articles in international journals and collections	ru_RU