KFU. Card publication. Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field

KAZAN
FEDERAL UNIVERSITY

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- 中文
- ES

MATHEMATICAL MODELLING OF RF PLASMA FLOW AT LOW PRESSURES WITH 3D ELECTROMAGNETIC FIELD

Form of presentation

Articles in international journals and collections

Year of publication

2019

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Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Y, Zheltukhin V.S., Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field//Advances in Materials Science and Engineering. - 2019. - Vol.2019, Is.. - Art. � 7120217.

Keywords

rf plasma, mathematical modeling, low pressure, electromagnetic field

The name of the journal

ADVANCES IN MATERIALS SCIENCE AND ENGINEERING

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85060819884&doi=10.1155%2f2019%2f7120217&partnerID=40&md5=6d6dc3b73c1327c4225217497f36c25e

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=196714&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2019-01-01T00:00:00Z	ru_RU
dc.date.available	2019-01-01T00:00:00Z	ru_RU
dc.date.issued	2019	ru_RU
dc.identifier.citation	Shemakhin A.Y, Zheltukhin V.S., Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field//Advances in Materials Science and Engineering. - 2019. - Vol.2019, Is.. - Art. � 7120217.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=196714&p_lang=2	ru_RU
dc.description.abstract	ADVANCES IN MATERIALS SCIENCE AND ENGINEERING	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	rf plasma	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	electromagnetic field	ru_RU
dc.title	Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field	ru_RU
dc.type	Articles in international journals and collections	ru_RU