KFU. Card publication. Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

MATHEMATICAL MODELLING OF RF PLASMA FLOW AT LOW PRESSURES WITH 3D ELECTROMAGNETIC FIELD

Form of presentation

Articles in international journals and collections

Year of publication

2019

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A.Y, Zheltukhin V.S., Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field//Advances in Materials Science and Engineering. - 2019. - Vol.2019, Is.. - Art. � 7120217.

Keywords

rf plasma, mathematical modeling, low pressure, electromagnetic field

The name of the journal

ADVANCES IN MATERIALS SCIENCE AND ENGINEERING

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85060819884&doi=10.1155%2f2019%2f7120217&partnerID=40&md5=6d6dc3b73c1327c4225217497f36c25e

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=196714&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2019-01-01T00:00:00Z	ru_RU
dc.date.available	2019-01-01T00:00:00Z	ru_RU
dc.date.issued	2019	ru_RU
dc.identifier.citation	Shemakhin A.Y, Zheltukhin V.S., Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field//Advances in Materials Science and Engineering. - 2019. - Vol.2019, Is.. - Art. � 7120217.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=196714&p_lang=2	ru_RU
dc.description.abstract	ADVANCES IN MATERIALS SCIENCE AND ENGINEERING	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	rf plasma	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	electromagnetic field	ru_RU
dc.title	Mathematical modelling of RF plasma flow at low pressures with 3D electromagnetic field	ru_RU
dc.type	Articles in international journals and collections	ru_RU