KFU. Card publication. Characterization of low-energy Ag+-ion implanted silicon by optical reflection spectra

KAZAN
FEDERAL UNIVERSITY

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CHARACTERIZATION OF LOW-ENERGY AG+-ION IMPLANTED SILICON BY OPTICAL REFLECTION SPECTRA

Form of presentation

International monographs

Year of publication

2018

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Authors, employees of KFU

Vorobev Vyacheslav Valerevich, author

Osin Yuriy Nikolaevich, author

Rogov Aleksey Mikhaylovich, author

Stepanov Andrey Lvovich, author

Other authors

Valeev V F, author

Nuzhdin V I, author

Bibliographic description in the original language

A.L. Stepanov, V.V. Vorobev, V.I. Nuzhdin, V.F. Valeev, A.M. Rogov, and Y.N. Osin. Chapter 3, Characterization of low-energy Ag+-ion implanted silicon by optical reflection spectra, Ed. Alexander Pogrebnjak, Nova Science Publishers, New York, 2018 - P 77-91.

Keywords

Characterization ,ion implanted, silicon, optical reflection spectra

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=191772&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Vorobev Vyacheslav Valerevich	ru_RU
dc.contributor.author	Osin Yuriy Nikolaevich	ru_RU
dc.contributor.author	Rogov Aleksey Mikhaylovich	ru_RU
dc.contributor.author	Stepanov Andrey Lvovich	ru_RU
dc.contributor.author	Valeev V F	ru_RU
dc.contributor.author	Nuzhdin V I	ru_RU
dc.date.accessioned	2018-01-01T00:00:00Z	ru_RU
dc.date.available	2018-01-01T00:00:00Z	ru_RU
dc.date.issued	2018	ru_RU
dc.identifier.citation	A.L. Stepanov, V.V. Vorobev, V.I. Nuzhdin, V.F. Valeev, A.M. Rogov, and Y.N. Osin. Chapter 3, Characterization of low-energy Ag+-ion implanted silicon by optical reflection spectra, Ed. Alexander Pogrebnjak, Nova Science Publishers, New York, 2018 - P 77-91.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=191772&p_lang=2	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	Characterization	ru_RU
dc.subject	ion implanted	ru_RU
dc.subject	silicon	ru_RU
dc.subject	optical reflection spectra	ru_RU
dc.title	Characterization of low-energy Ag+-ion implanted silicon by optical reflection spectra	ru_RU
dc.type	International monographs	ru_RU