KFU. Card publication. Modification of the Scharfetter Gummel Method for Calculating the Flux of Charged Particles for Simulation of a Radio-Frequency Capacitive Coupled Discharge

- RUS
- 中文
- ES

MODIFICATION OF THE SCHARFETTER GUMMEL METHOD FOR CALCULATING THE FLUX OF CHARGED PARTICLES FOR SIMULATION OF A RADIO-FREQUENCY CAPACITIVE COUPLED DISCHARGE

Form of presentation

Articles in international journals and collections

Year of publication

2017

��

��

Authors, employees of KFU

Chebakova Violetta Yurevna, author

Bibliographic description in the original language

Zheltukhin V. S., Fadeeva M. S., Chebakova V. Ju., Modification of the Scharfetter Gummel Method for Calculating the Flux of Charged Particles for Simulation of a Radio-Frequency Capacitive Coupled Discharge//UCHENYE ZAPISKI KAZANSKOGO UNIVERSITETA-SERIYA FIZIKO-MATEMATICHESKIE NAUKI. - 2017. - Vol.159, Is.4. - P.444-457.

Keywords

��

The name of the journal

UCHENYE ZAPISKI KAZANSKOGO UNIVERSITETA-SERIYA FIZIKO-MATEMATICHESKIE NAUKI

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=189970&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Chebakova Violetta Yurevna	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Zheltukhin V. S., Fadeeva M. S., Chebakova V. Ju., Modification of the Scharfetter Gummel Method for Calculating the Flux of Charged Particles for Simulation of a Radio-Frequency Capacitive Coupled Discharge//UCHENYE ZAPISKI KAZANSKOGO UNIVERSITETA-SERIYA FIZIKO-MATEMATICHESKIE NAUKI. - 2017. - Vol.159, Is.4. - P.444-457.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=189970&p_lang=2	ru_RU
dc.description.abstract	UCHENYE ZAPISKI KAZANSKOGO UNIVERSITETA-SERIYA FIZIKO-MATEMATICHESKIE NAUKI	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Modification of the Scharfetter Gummel Method for Calculating the Flux of Charged Particles for Simulation of a Radio-Frequency Capacitive Coupled Discharge	ru_RU
dc.type	Articles in international journals and collections	ru_RU