Kazan (Volga region) Federal University, KFU
KAZAN
FEDERAL UNIVERSITY
 
STUDY OF SILICON SURFACE IMPLANTED BY SILVER IONS
Form of presentationArticles in international journals and collections
Year of publication2019
Языканглийский
  • Vorobev Vyacheslav Valerevich, author
  • Osin Yuriy Nikolaevich, author
  • Rogov Aleksey Mikhaylovich, author
  • Bibliographic description in the original language Stepanov A.L, Nuzhdin V.I, Valeev V.F, Study of silicon surface implanted by silver ions//Vacuum. - 2019. - Vol.159, Is.. - P.353-357.
    Keywords Имплантация
    The name of the journal Vacuum
    URL https://www.scopus.com/inward/record.uri?eid=2-s2.0-85055533409&doi=10.1016%2fj.vacuum.2018.10.060&partnerID=40&md5=964d8a37091be35e076ec12f3dca3b78
    Please use this ID to quote from or refer to the card https://repository.kpfu.ru/eng/?p_id=189590&p_lang=2

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