KFU. Card publication. Study of silicon surface implanted by silver ions

KAZAN
FEDERAL UNIVERSITY

- RUS
- 中文
- ES

STUDY OF SILICON SURFACE IMPLANTED BY SILVER IONS

Form of presentation

Articles in international journals and collections

Year of publication

2018

Язык

английский

Authors, employees of KFU

Vorobev Vyacheslav Valerevich, author

Osin Yuriy Nikolaevich, author

Rogov Aleksey Mikhaylovich, author

Stepanov Andrey Lvovich, author

Other authors

Nuzhdin V I, author

Valeev V F, author

Authors, postgraduates KFU

Vorobev Vyacheslav Valerevich, postgraduate kfu

Bibliographic description in the original language

Stepanov A.L., Nuzhdin V.I., Valeev V.F., Vorobev V.V., Rogov A.M., Osin Y.N., Study of silicon surface implanted by silver ions // Vacuum, 2019, 159, pp. 353–357.

Annotation

Vacuum

Keywords

silicon, implantation, silver ions

The name of the journal

Vacuum

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=187558&p_lang=2

Resource files

File name	Size (MB)	Format
Step_2018_Vacuum_Ag_PSi.pdf	6,71	pdf	show / download

Full metadata record

Field DC	Value	Language
dc.contributor.author	Vorobev Vyacheslav Valerevich	ru_RU
dc.contributor.author	Osin Yuriy Nikolaevich	ru_RU
dc.contributor.author	Rogov Aleksey Mikhaylovich	ru_RU
dc.contributor.author	Stepanov Andrey Lvovich	ru_RU
dc.contributor.author	Nuzhdin V I	ru_RU
dc.contributor.author	Valeev V F	ru_RU
dc.contributor.author	Vorobev Vyacheslav Valerevich	ru_RU
dc.date.accessioned	2018-01-01T00:00:00Z	ru_RU
dc.date.available	2018-01-01T00:00:00Z	ru_RU
dc.date.issued	2018	ru_RU
dc.identifier.citation	Stepanov A.L., Nuzhdin V.I., Valeev V.F., Vorobev V.V., Rogov A.M., Osin Y.N., Study of silicon surface implanted by silver ions // Vacuum, 2019, 159, pp. 353–357.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=187558&p_lang=2	ru_RU
dc.description.abstract	Vacuum	ru_RU
dc.description.abstract	Vacuum	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	silicon	ru_RU
dc.subject	implantation	ru_RU
dc.subject	silver ions	ru_RU
dc.title	Study of silicon surface implanted by silver ions	ru_RU
dc.type	Articles in international journals and collections	ru_RU