KFU. Card publication. Simulation of electron moving in RF capacitively coupled discharge

KAZAN
FEDERAL UNIVERSITY

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SIMULATION OF ELECTRON MOVING IN RF CAPACITIVELY COUPLED DISCHARGE

Form of presentation

Articles in international journals and collections

Year of publication

2018

Язык

английский

Authors, employees of KFU

Askhatov Radik Mukhametgaleevich, author

Badriev Ildar Burkhanovich, author

Chebakova Violetta Yurevna, author

Bibliographic description in the original language

Askhatov R.M, Badriev I.B, Chebakova V.Yu, Zheltukhin V.S. Simulation of electron moving in RF capacitively coupled discharge//Journal of Physics: Conference Series. - 2018. - Vol.1058, Is.1. - Art. № 012044.

Keywords

Simulation

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051859166&doi=10.1088%2f1742-6596%2f1058%2f1%2f012044&partnerID=40&md5=e60751291c079c3466a4eceebd1e03a8

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=185662&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Askhatov Radik Mukhametgaleevich	ru_RU
dc.contributor.author	Badriev Ildar Burkhanovich	ru_RU
dc.contributor.author	Chebakova Violetta Yurevna	ru_RU
dc.date.accessioned	2018-01-01T00:00:00Z	ru_RU
dc.date.available	2018-01-01T00:00:00Z	ru_RU
dc.date.issued	2018	ru_RU
dc.identifier.citation	Askhatov R.M, Badriev I.B, Chebakova V.Yu, Zheltukhin V.S. Simulation of electron moving in RF capacitively coupled discharge//Journal of Physics: Conference Series. - 2018. - Vol.1058, Is.1. - Art. № 012044.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=185662&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Simulation of electron moving in RF capacitively coupled discharge	ru_RU
dc.type	Articles in international journals and collections	ru_RU