KFU. Card publication. MATHEMATICAL MODELING OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE

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FEDERAL UNIVERSITY

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MATHEMATICAL MODELING OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE

Form of presentation

Articles in international journals and collections

Year of publication

2017

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Authors, employees of KFU

Zheltukhin Viktor Semenovich, author

Shemakhin Aleksandr Yurevich, author

Bibliographic description in the original language

Shemakhin A. Yu., Zheltukhin V. S., MATHEMATICAL MODELING OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE//MATHEMATICA MONTISNIGRI. - 2017. - Vol.39, Is.. - P.126-132.

Keywords

mathematical modeling, gas-dynamics, rf plasma, low pressure, plasma flow

The name of the journal

MATHEMATICA MONTISNIGRI

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=173604&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Shemakhin A. Yu., Zheltukhin V. S., MATHEMATICAL MODELING OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE//MATHEMATICA MONTISNIGRI. - 2017. - Vol.39, Is.. - P.126-132.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=173604&p_lang=2	ru_RU
dc.description.abstract	MATHEMATICA MONTISNIGRI	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	mathematical modeling	ru_RU
dc.subject	gas-dynamics	ru_RU
dc.subject	rf plasma	ru_RU
dc.subject	low pressure	ru_RU
dc.subject	plasma flow	ru_RU
dc.title	MATHEMATICAL MODELING OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE	ru_RU
dc.type	Articles in international journals and collections	ru_RU