KFU. Card publication. Modeling and Simulation of Rarefied~ RF~ Plasma~ Flow

MODELING AND SIMULATION OF RAREFIED~ RF~ PLASMA~ FLOW

Form of presentation

Conference proceedings in international journals and collections

Year of publication

2017

Язык

английский

Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Other authors

Zheltukhin Viktor Semenovich, author

Bibliographic description in the original language

Zheltukhin V., Shemakhin A. Modeling and Simulation of Rarefied~ RF~ Plasma~ Flow //Bulletin of the American Physical Society. – 2017. – T. 62.

Annotation

Bulletin of the American Physical Society

Keywords

mathematical modelling, RF plasma

The name of the journal

Bulletin of the American Physical Society

URL

http://meetings.aps.org/Meeting/GEC17/Session/NW1.53

Please use this ID to quote from or refer to the card

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Zheltukhin V., Shemakhin A. Modeling and Simulation of Rarefied~ RF~ Plasma~ Flow //Bulletin of the American Physical Society. – 2017. – Т. 62.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=172404&p_lang=2	ru_RU
dc.description.abstract	Bulletin of the American Physical Society	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	mathematical modelling	ru_RU
dc.subject	RF plasma	ru_RU
dc.title	Modeling and Simulation of Rarefied~ RF~ Plasma~ Flow	ru_RU
dc.type	Conference proceedings in international journals and collections	ru_RU