KFU. Card publication. Simulation of rarefied low pressure RF plasma flow around the sample

KAZAN
FEDERAL UNIVERSITY

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- ES

SIMULATION OF RAREFIED LOW PRESSURE RF PLASMA FLOW AROUND THE SAMPLE

Form of presentation

Articles in international journals and collections

Year of publication

2017

Язык

английский

Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Other authors

Zheltukhin Viktor Semenovich, author

Bibliographic description in the original language

Zheltukhin V.S, Shemakhin A.Y., Simulation of rarefied low pressure RF plasma flow around the sample//Journal of Physics: Conference Series. - 2017. - Vol.789, Is.1. - Art. № 012071.

Keywords

математическое моделирование, ВЧ-плазма, пониженное давление

The name of the journal

Journal of Physics: Conference Series

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014707974&doi=10.1088%2f1742-6596%2f789%2f1%2f012071&partnerID=40&md5=115c4be666f61f43c7811d478efc89e2

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=163827&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.date.accessioned	2017-01-01T00:00:00Z	ru_RU
dc.date.available	2017-01-01T00:00:00Z	ru_RU
dc.date.issued	2017	ru_RU
dc.identifier.citation	Zheltukhin V.S, Shemakhin A.Y., Simulation of rarefied low pressure RF plasma flow around the sample//Journal of Physics: Conference Series. - 2017. - Vol.789, Is.1. - Art. № 012071.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=163827&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	математическое моделирование	ru_RU
dc.subject	ВЧ-плазма	ru_RU
dc.subject	пониженное давление	ru_RU
dc.title	Simulation of rarefied low pressure RF plasma flow around the sample	ru_RU
dc.type	Articles in international journals and collections	ru_RU