KFU. Card publication. Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem

KAZAN
FEDERAL UNIVERSITY

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CAPACITIVE COUPLED RF DISCHARGE: MODELLING AT THE LOCAL AND NOT LOCAL STATEMENT OF THE PROBLEM

Form of presentation

Articles in international journals and collections

Year of publication

2016

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Authors, employees of KFU

Askhatov Radik Mukhametgaleevich, author

Zheltukhin Viktor Semenovich, author

Chebakova Violetta Yurevna, author

Bibliographic description in the original language

Askhatov R.M, Chebakova V.Yu, Zheltukhin V.S., Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem//IOP Conference Series: Materials Science and Engineering. - 2016. - Vol.158, Is.1. - Art. � 012009.

Keywords

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The name of the journal

IOP Conference Series: Materials Science and Engineering

URL

https://www.scopus.com/inward/record.url?eid=2-s2.0-85014412491&partnerID=40&md5=f4c6e9770cdd108f3d7c0e6dd11f48f4

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=154112&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Askhatov Radik Mukhametgaleevich	ru_RU
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.contributor.author	Chebakova Violetta Yurevna	ru_RU
dc.date.accessioned	2016-01-01T00:00:00Z	ru_RU
dc.date.available	2016-01-01T00:00:00Z	ru_RU
dc.date.issued	2016	ru_RU
dc.identifier.citation	Askhatov R.M, Chebakova V.Yu, Zheltukhin V.S., Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem//IOP Conference Series: Materials Science and Engineering. - 2016. - Vol.158, Is.1. - Art. � 012009.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=154112&p_lang=2	ru_RU
dc.description.abstract	IOP Conference Series: Materials Science and Engineering	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem	ru_RU
dc.type	Articles in international journals and collections	ru_RU