KFU. Card publication. Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem

KAZAN
FEDERAL UNIVERSITY

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CAPACITIVE COUPLED RF DISCHARGE: MODELLING AT THE LOCAL AND NOT LOCAL STATEMENT OF THE PROBLEM

Form of presentation

Articles in international journals and collections

Year of publication

2016

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Authors, employees of KFU

Askhatov Radik Mukhametgaleevich, author

Chebakova Violetta Yurevna, author

Bibliographic description in the original language

Askhatov R.M, Chebakova V.Yu, Zheltukhin V.S., Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem//IOP Conference Series: Materials Science and Engineering. - 2016. - Vol.158, Is.1. - Art. � 012009.

Keywords

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The name of the journal

IOP Conference Series: Materials Science and Engineering

URL

https://www.scopus.com/inward/record.url?eid=2-s2.0-85014412491&partnerID=40&md5=f4c6e9770cdd108f3d7c0e6dd11f48f4

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=154112&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Askhatov Radik Mukhametgaleevich	ru_RU
dc.contributor.author	Chebakova Violetta Yurevna	ru_RU
dc.date.accessioned	2016-01-01T00:00:00Z	ru_RU
dc.date.available	2016-01-01T00:00:00Z	ru_RU
dc.date.issued	2016	ru_RU
dc.identifier.citation	Askhatov R.M, Chebakova V.Yu, Zheltukhin V.S., Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem//IOP Conference Series: Materials Science and Engineering. - 2016. - Vol.158, Is.1. - Art. � 012009.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=154112&p_lang=2	ru_RU
dc.description.abstract	IOP Conference Series: Materials Science and Engineering	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Capacitive coupled RF discharge: Modelling at the local and not local statement of the problem	ru_RU
dc.type	Articles in international journals and collections	ru_RU