KFU. Card publication. Low temperature plasma RF capacitive discharge in helium at atmospheric pressure

KAZAN
FEDERAL UNIVERSITY

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- 中文
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LOW TEMPERATURE PLASMA RF CAPACITIVE DISCHARGE IN HELIUM AT ATMOSPHERIC PRESSURE

Form of presentation

Articles in international journals and collections

Year of publication

2016

Authors, employees of KFU

Kashapov Nail Faikovich, author

Fayrushin Ilnaz Izailovich, author

Authors, postgraduates KFU

Khakki Adnan , postgraduate kfu

Bibliographic description in the original language

Hakki, A. Low temperature plasma RF capacitive discharge in helium at atmospheric pressure / A. Hakki, I. Fayrushin, N. Kashapov // Low temperature Plasma in the Processes of Functional Coating Preparation - Journal of Physics: Conference Series. - 2016. - V. 669. - 012022.

Keywords

Low temperature plasma, RF capacitive discharge

The name of the journal

Journal of Physics: Conference Series

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=152489&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Kashapov Nail Faikovich	ru_RU
dc.contributor.author	Fayrushin Ilnaz Izailovich	ru_RU
dc.contributor.author	Khakki Adnan	ru_RU
dc.date.accessioned	2016-01-01T00:00:00Z	ru_RU
dc.date.available	2016-01-01T00:00:00Z	ru_RU
dc.date.issued	2016	ru_RU
dc.identifier.citation	Hakki, A. Low temperature plasma RF capacitive discharge in helium at atmospheric pressure / A. Hakki, I. Fayrushin, N. Kashapov // Low temperature Plasma in the Processes of Functional Coating Preparation - Journal of Physics: Conference Series. - 2016. - V. 669. - 012022.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=152489&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	Low temperature plasma	ru_RU
dc.subject	RF capacitive discharge	ru_RU
dc.title	Low temperature plasma RF capacitive discharge in helium at atmospheric pressure	ru_RU
dc.type	Articles in international journals and collections	ru_RU