KFU. Card publication. Mathematical simulation of intelligent control system of metal vacuum sputtering process on the basis of application of multi-agent system

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MATHEMATICAL SIMULATION OF INTELLIGENT CONTROL SYSTEM OF METAL VACUUM SPUTTERING PROCESS ON THE BASIS OF APPLICATION OF MULTI-AGENT SYSTEM

Form of presentation

Articles in international journals and collections

Year of publication

2013

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Authors, employees of KFU

Israfilov Irek Khusnemardanovich, author

Simonova Larisa Anatolevna, author

Other authors

Chernova Marina Aleksandrovna, author

Authors, postgraduates KFU

Chernova Marina Aleksandrovna, postgraduate kfu

Bibliographic description in the original language

Larisa, S., Irek, I., Danis, I., Marina, C. Mathematical simulation of intelligent control system of metal vacuum sputtering process on the basis of application of multi-agent system (2013) World Applied Sciences Journal, 23 (7), pp. 930-934.doi: 10.5829/idosi.wasj.2013.23.07.13116

Annotation

A vacuum sputtering process comprises evaporation of the material and subsequent vapor condensation on the substrates. Getting required and repeatable quality of coatings is challenging task. It depends on capabilities of equipment, type of evaporator, interaction evaporator with the evaporating substance and deposition process. Sputtering process parameters are determined by the ability evaporator to maintain a certain temperature evaporated substance for a long time. Controlling operations sequence of pumping and heating depends on achieving optimum vacuum conditions, in spite of used pumping method. The control system must foresee and identify emerging cracks or damage of the system components. This paper focuses on the development of intelligent control system vacuum process on the agent-based approach.

Keywords

Controlling operations; Intelligent control system; Vacuum sputtering process

The name of the journal

World Applied Sciences Journal

URL

http://idosi.org/wasj/wasj23(7)13/10.pdf

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=147353&p_lang=2

Resource files

File name	Size (MB)	Format
10.pdf	0,28	pdf	show / download

Full metadata record

Field DC	Value	Language
dc.contributor.author	Israfilov Irek Khusnemardanovich	ru_RU
dc.contributor.author	Simonova Larisa Anatolevna	ru_RU
dc.contributor.author	Chernova Marina Aleksandrovna	ru_RU
dc.contributor.author	Chernova Marina Aleksandrovna	ru_RU
dc.date.accessioned	2013-01-01T00:00:00Z	ru_RU
dc.date.available	2013-01-01T00:00:00Z	ru_RU
dc.date.issued	2013	ru_RU
dc.identifier.citation	Larisa, S., Irek, I., Danis, I., Marina, C. Mathematical simulation of intelligent control system of metal vacuum sputtering process on the basis of application of multi-agent system (2013) World Applied Sciences Journal, 23 (7), pp. 930-934.doi: 10.5829/idosi.wasj.2013.23.07.13116	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=147353&p_lang=2	ru_RU
dc.description.abstract	World Applied Sciences Journal	ru_RU
dc.description.abstract	A vacuum sputtering process comprises evaporation of the material and subsequent vapor condensation on the substrates. Getting required and repeatable quality of coatings is challenging task. It depends on capabilities of equipment, type of evaporator, interaction evaporator with the evaporating substance and deposition process. Sputtering process parameters are determined by the ability evaporator to maintain a certain temperature evaporated substance for a long time. Controlling operations sequence of pumping and heating depends on achieving optimum vacuum conditions, in spite of used pumping method. The control system must foresee and identify emerging cracks or damage of the system components. This paper focuses on the development of intelligent control system vacuum process on the agent-based approach.	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Mathematical simulation of intelligent control system of metal vacuum sputtering process on the basis of application of multi-agent system	ru_RU
dc.type	Articles in international journals and collections	ru_RU