KFU. Card publication. Microwave techniques for electron density measurements in low pressure RF plasmas

KAZAN
FEDERAL UNIVERSITY

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- 中文
- ES

MICROWAVE TECHNIQUES FOR ELECTRON DENSITY MEASUREMENTS IN LOW PRESSURE RF PLASMAS

Form of presentation

Conference proceedings in international journals and collections

Year of publication

2016

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Authors, employees of KFU

Shemakhin Aleksandr Yurevich, author

Other authors

Gafarov I A, author

Zheltukhin Viktor Semenovich, author

Bibliographic description in the original language

Zheltukhin V., Gafarov I., Shemakhin A. Microwave techniques for electron density measurements in low pressure RF plasmas //Bulletin of the American Physical Society. – 2016.

Annotation

Bulletin of the American Physical Society

Keywords

plasma

The name of the journal

Bulletin of the American Physical Society

URL

http://meetings.aps.org/Meeting/GEC16/Session/MW6.71

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=138998&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Shemakhin Aleksandr Yurevich	ru_RU
dc.contributor.author	Gafarov I A	ru_RU
dc.contributor.author	Zheltukhin Viktor Semenovich	ru_RU
dc.date.accessioned	2016-01-01T00:00:00Z	ru_RU
dc.date.available	2016-01-01T00:00:00Z	ru_RU
dc.date.issued	2016	ru_RU
dc.identifier.citation	Zheltukhin V., Gafarov I., Shemakhin A. Microwave techniques for electron density measurements in low pressure RF plasmas //Bulletin of the American Physical Society. – 2016.	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=138998&p_lang=2	ru_RU
dc.description.abstract	Bulletin of the American Physical Society	ru_RU
dc.language.iso	ru	ru_RU
dc.subject		ru_RU
dc.title	Microwave techniques for electron density measurements in low pressure RF plasmas	ru_RU
dc.type	Conference proceedings in international journals and collections	ru_RU