KFU. Card publication. Low temperature plasma RF capacitive discharge in helium at atmospheric pressure

KAZAN
FEDERAL UNIVERSITY

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LOW TEMPERATURE PLASMA RF CAPACITIVE DISCHARGE IN HELIUM AT ATMOSPHERIC PRESSURE

Form of presentation

Articles in international journals and collections

Year of publication

2016

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Authors, employees of KFU

Fayrushin Ilnaz Izailovich, author

Bibliographic description in the original language

Hakki A. Low temperature plasma RF capacitive discharge in helium at atmospheric pressure / A. Hakki, I Fayrushin I., N. Kashapov // Journal of Physics: Conference Series. - 2016. 669. Article number 012022

Keywords

RF capacitive discharge, helium, atmospheric pressure

The name of the journal

Journal of Physics: Conference Series

Please use this ID to quote from or refer to the card

https://repository.kpfu.ru/eng/?p_id=134627&p_lang=2

Full metadata record

Field DC	Value	Language
dc.contributor.author	Fayrushin Ilnaz Izailovich	ru_RU
dc.date.accessioned	2016-01-01T00:00:00Z	ru_RU
dc.date.available	2016-01-01T00:00:00Z	ru_RU
dc.date.issued	2016	ru_RU
dc.identifier.citation	Hakki A. Low temperature plasma RF capacitive discharge in helium at atmospheric pressure / A. Hakki, I Fayrushin I., N. Kashapov // Journal of Physics: Conference Series. - 2016. 669. Article number 012022	ru_RU
dc.identifier.uri	https://repository.kpfu.ru/eng/?p_id=134627&p_lang=2	ru_RU
dc.description.abstract	Journal of Physics: Conference Series	ru_RU
dc.language.iso	ru	ru_RU
dc.subject	RF capacitive discharge	ru_RU
dc.subject	helium	ru_RU
dc.subject	atmospheric pressure	ru_RU
dc.title	Low temperature plasma RF capacitive discharge in helium at atmospheric pressure	ru_RU
dc.type	Articles in international journals and collections	ru_RU