Kazan (Volga region) Federal University, KFU
KAZAN
FEDERAL UNIVERSITY
 
CALCULATIONS OF RF PLASMA FLOW WITH METASTABLE ATOMS AT LOW PRESSURE
Form of presentationConference proceedings in Russian journals and collections
Year of publication2016
Языкрусский
  • Shemakhin Aleksandr Yurevich, author
  • Zheltukhin Viktor Semenovich, author
  • Bibliographic description in the original language Calculations of rf plasma flow with metastable atoms at low pressure. Shemakhin A Yu, Zheltukhin V S // Book of Abstracts of "XXXI International Conference on Equations of State for Matter".- 2016.- C. 323.
    Annotation Book of Abstracts of "XXXI International Conference on Equations of State for Matter"
    Keywords mathematical modeling, RF plasma
    The name of the journal Book of Abstracts of "XXXI International Conference on Equations of State for Matter"
    Please use this ID to quote from or refer to the card https://repository.kpfu.ru/eng/?p_id=130405&p_lang=2

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