Registration\Conference ''The Physics of Low Temperature Plasma'' (from 5 to 9 June 2017) - Kazan (Volga region) Federal University
 
First Name *
Alvaro
Last Name
Martin Ortega
Scientific degree *
PhD
Country *
France
City *
Grenoble
Authors of report *
A. Martin Ortega, A. Bes, S. Bechu, A. Lacoste,
Title of the report *
Modelling and characterisation of elementary microwave plasma sources at medium pressure (1 to 50 Torr) for high rate deposition.
Type of the report *
Poster
Update
* - fields that couldn't be empty